Dichroic Mirror Array

ABSTRACT

A dichroic mirror array in which a plurality of dichroic mirrors are arranged, and by satisfying a predetermined relationship between a width, a thickness, a material, a tilt, an interval, and a step difference of each dichroic mirror, the dichroic mirror array is miniaturized, an optical path length is reduced, and at the same time, an opening width is increased.

TECHNICAL FIELD

The present invention relates to an apparatus that divides light by dividing a single light beam or a plurality of light beams into light beams having respectively different wavelengths or an apparatus that overlaps light beams having a plurality of different wavelengths on a single light beam.

BACKGROUND ART

A dichroic mirror array is an apparatus in which a plurality of dichroic mirrors having different spectroscopic characteristics (wavelength dependence of transmitting light and reflection light with respect to incident light) are arranged at equal intervals in parallel with each other in the same direction. The light beam incident on the dichroic mirror array is divided into a plurality of light beams having different wavelength bands by repeating reflection and transmission in order of arrangement in each dichroic mirror, and is spectroscopically detected by detecting the light beams. Alternatively, a plurality of light beams having different wavelength bands incident on each dichroic mirror are integrated into a single light beam in which different wavelength bands overlapped by repeating reflection and transmission in each dichroic mirror.

PTL 1 discloses a spectroscopic apparatus that uses the dichroic mirror array. A plurality of dichroic mirrors having different spectroscopic characteristics are arranged at equal intervals in parallel with each other in the same direction, and incident light incident in an arrangement direction repeats reflection and transmission in each dichroic mirror, thereby, being emitted in a direction perpendicular to the arrangement direction, and is divided into a plurality of emission lights having different wavelength bands. The emission lights are perpendicularly incident on each sensor of a sensor array in which a plurality of the sensors are arranged in the above-described direction and are detected. Each dichroic mirror configuring the dichroic array is a dielectric multilayer film formed inside a transparent material such as glass. Alternatively, each dichroic mirror configuring the dichroic mirror array has a plate shape and is arranged in the atmosphere.

PTL 2 discloses a spectroscopic apparatus that uses the dichroic mirror array of a type different from the spectroscopic apparatus of PTL 1. A plurality of dichroic mirrors having different spectroscopic characteristics are arranged at equal intervals in parallel with each other in the same direction in the atmosphere. In addition, a total reflection mirror array is arranged in the above-described direction in parallel with each other at equal intervals. The respective total reflection mirrors are arranged such that reflection light of each dichroic mirror is incident and the reflection light is incident on the adjacent dichro. The incident light incident in the above-described direction is perpendicularly bent and then, repeatedly reflected and transmitted by and through each dichroic mirror and each total reflection mirror, and thereby, being emitted in a direction perpendicular to the above-described direction and on a side opposite to the total reflection mirror array, and is divided into a plurality of emission lights having different wavelength bands. The emission lights are perpendicularly incident on the respective sensors of a sensor array in which a plurality of sensors are arranged in the above-described direction and are detected. In PTL 1, an incidence angle of the incident light on each dichroic mirror is based on 45°, whereas in PTL 2, the incidence angle can be formed to be less than 45°, and thereby, there is a merit that the spectroscopic characteristics of each dichroic mirror can be improved.

PTL 3 discloses a multiplexing apparatus that uses the dichroic mirror array. A plurality of dichroic mirrors having different spectroscopic characteristics are arranged in parallel with each other at equal intervals in the same direction, and a plurality of laser beams of different wavelengths incident on each dichroic mirror are repeatedly reflected and transmitted by and through each dichroic mirror thereby being emitted in the above-described direction, and are integrated into a single laser beam having different wavelengths. Here, the respective dichroic mirrors are arranged with a step in a direction perpendicular to the above-described direction, but there is no disclosure on explanation thereof and the amount thereof.

CITATION LIST Patent Literature

PTL 1: JP-A-2012-242117

PTL 2: Japanese Patent No. 4109174

PTL 3: US 2002/0154317 A1

SUMMARY OF INVENTION Technical Problem

In PTL 1 to PTL 3, incident light is parallel light or substantially parallel light. However, the incident light is often not regarded as the parallel light in many cases as a practical problem. In that case, the incident light is treated as a light beam and it is necessary to consider how the diameter of the light beam (a width of a cross section perpendicular to an optical axis of the light beam) changes. This is because an opening width of the dichroic mirror array representing an upper limit of the diameter of the light beam that can be received is determined by a structure thereof. For example, if the diameter of the light beam increases with an optical path length, there is a case where the diameter exceeds the opening width and a part of the light beam is shaded by the structure of the dichroic mirror array, that is, a case where a part of the light beam is lost and is not detected. Thus, it is desirable for the dichroic mirror array to have as short an optical path length as possible and to have as large an opening width as possible. Here, the optical path length of the dichroic mirror array is defined as an optical path length of the division light having the longest optical path length among a plurality of division lights generated by the dichroic mirror array. Alternatively, the optical path length of the dichroic mirror array is defined as an optical path length of incident light having the longest optical path length among a plurality of incident lights integrated by the dichroic mirror array. In order to shorten the optical path length of the dichroic mirror array, it is necessary to miniaturize the dichroic mirror array, that is, to reduce a size and an interval of each dichroic mirror array. Meanwhile, miniaturizing the dichroic mirror array makes it possible to reduce a size of an apparatus, and thereby, it is also possible to reduce a manufacturing cost. For example, since the size of each dichroic mirror can be reduced, a unit cost of each dichroic mirror can be reduced.

However, a problem that, if the dichroic mirror array is miniaturized, the opening width is rapidly reduced was found by the present inventor. That is, it is found that there was a trade-off relationship between reduction of the optical path length of the dichroic array and an increase of the opening width and it was difficult to make those compatible. In the conventional dichroic mirror array including PTL 1 to PTL 3, the problem is not recognized or taken into consideration. In addition, it was not also studied about what type of dichroic array structure could be detected for any light beam which was not parallel light strictly, without loss of a part of the light beam.

Solution to Problem

First, if a size of the dichroic mirror array was reduced, the reason why the opening width was sharply reduced was considered. As a result, it turned out that the following two were the cause. One was that a ratio of a thickness of each dichroic mirror to a width of an incidence surface of each dichroic mirror cannot be ignored, specifically, the amount of refraction of a light beam inside each dichroic mirror, that is, a ratio of a deviation (deviation in a direction perpendicular to the arrangement direction of the dichroic mirror array) of an optical axis before and after the light beam transmits each dichroic mirror to a width (width of the incident light surface of each dichroic mirror) of a direction perpendicular to the arrangement direction of each dichroic mirror could not be ignored. The other is that a ratio of the thickness of each dichroic mirror to an interval of each dichroic mirror in the arrangement direction could not be ignored, specifically, a ratio of a width of a portion shaded by the (n−1)th dichroic mirror of the light beam to a width of a light beam reflected by an nth dichroic mirror was not ignored. In any case, it corresponds to the fact that the thickness of each dichroic mirror cannot be regarded as zero.

Therefore, in the present invention, a structure of the dichroic mirror array is optimized so as to avoid or reduce influence of an increase in the ratio of the thickness of each dichroic mirror to the width and the interval of each dichroic mirror. In one specific aspect, in arrangement of each dichroic mirror, a step difference is provided in a direction perpendicular to the arrangement direction of the dichroic mirror array, and the amount of the step difference is optimized according to the width and the thickness of each dichroic mirror. In addition, in another aspect, in each dichroic mirror arrangement, the interval of each dichroic mirror is optimized according to the width and the thickness of each dichroic mirror. That is, the step difference and the interval of the dichroic mirror array satisfy a predetermined relationship between the width and the thickness of each dichroic mirror, and thereby, reduction of an optical path length and an increase of an opening width are both achieved while the above-described influence is avoided or reduced and the dichroic mirror array is miniaturized.

Advantageous Effects of Invention

According to the present invention, while a dichroic mirror array is miniaturized, reduction of an optical path length and an increase of an opening width can be both achieved. Thus, it is possible to reduce a size of an apparatus and to reduce cost, and it is possible to perform spectroscopic detection of various types of light beams and integration of various types of light beams.

Problems, configurations, and effects other than those described above will become apparent by description of the following embodiments.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a diagram illustrating a configuration of a dichroic mirror array in a best mode for reducing an optical path length and enlarging an opening width.

FIG. 2 is a diagram illustrating the optical path lengths of the dichroic array which are smaller than or equal to L_(max) and opening diameters greater than or equal to W_(min), and a relationship between a thickness β of a dichroic mirror and an interval x of the dichroic mirror arrays.

FIG. 3 is a diagram illustrating calculation results of parallel light beams with a maximum dividable width, in an example of a dichroic mirror array that divides light beams incident in parallel with the dichroic mirror array in a vertical direction.

FIG. 4 is a diagram illustrating the calculation results of the parallel light beams with the maximum dividable width, in an example of a dichroic mirror array that divides light beams perpendicularly incident on a dichroic mirror array in the same direction.

FIG. 5 is a diagram illustrating the calculation results of the parallel light beams with the maximum dividable width, in an example of a miniaturized dichroic array that divides light beams perpendicularly incident on the dichroic mirror array in the same direction.

FIG. 6 is a diagram illustrating the calculation results of the parallel light beams with the maximum dividable width, in an example of a miniaturized and step-arranged dichroic mirror array that divides light beams perpendicularly incident on the dichroic mirror array in the same direction.

FIG. 7 is a diagram illustrating the interval x of the dichroic mirror array, and a relationship between the opening width W and an optical path length change ΔL.

FIG. 8 is a diagram illustrating a relationship between step differences y and z of the dichroic mirror array and the opening width W.

FIG. 9 is a diagram illustrating the calculation results of the parallel light beams with the maximum dividable width, in an example of a dichroic mirror array in which light beams perpendicularly incident on the dichroic mirror array are divided in the same direction and the dichroic mirrors are tilted to be more than 45° with respect to the same direction.

FIG. 10 is a diagram illustrating a relationship between a tilt θ₀ of the dichroic mirror and the opening width W of the dichroic mirror array.

FIG. 11 is a diagram for defining a relationship between an optical path length and a maximum diameter of a light beam obtained by collecting light emitted from a light emission point.

FIG. 12 is a diagram illustrating an example of a relationship between the optical path length and the maximum diameter of a light beam, and a dichroic mirror array that is available.

FIG. 13 is a diagram illustrating an example of the relationship between the optical path length and the maximum diameter of the light beam, and the dichroic mirror array that is available.

FIG. 14 is a diagram illustrating an example of the relationship between the optical path length and the maximum diameter of the light beam, and the dichroic array that is available.

FIG. 15 is a diagram illustrating a relationship between the number of divisions of a light beam and the dichroic mirror array that is available.

FIG. 16 is a diagram illustrating an example of the relationship between the optical path length and the maximum diameter of the light beam, and the dichroic array that is available.

FIG. 17 is a schematic diagram of a light emission detection apparatus that separately collects light emitted from a light emission point array using a condenser lens array, divides the light beam into different wavelength bands in parallel using the dichroic mirror array, and detects the light beam incident on a sensor in parallel.

FIG. 18 is a schematic diagram of a configuration in which lights emitted from two adjacent light emission points are separately collected by condenser lenses and become separated light beams.

FIG. 19 is a schematic diagram of a configuration in which light emissions from the two adjacent light emission points are separately collected by the condenser lenses and become mixed light beams.

FIG. 20 is a diagram illustrating a relationship between the optical path length g between the condenser lens and the sensor and a focal length f of the condenser lens satisfying a conditions of high sensitivity and low crosstalk.

DESCRIPTION OF EMBODIMENTS

FIG. 1 is a schematic diagram illustrating an optimal arrangement that achieves both reduction of an optical path length of a dichroic mirror array and enlargement of an opening width in a generalized manner, in a case where a ratio of a thickness of each dichroic mirror to a width and an interval of each dichroic mirror is relatively large. In PTLs 1 and 2, incident light is introduced into the dichroic mirror array from a direction parallel to an arrangement direction of each dichroic mirror array, but an example in which incident light is introduced from a vertical direction so as to further downsize an apparatus will be hereinafter described.

As illustrated in FIG. 1, an arrangement axis in a first direction and an emission axis in a second direction perpendicular to the first direction are first defined. N dichroic mirrors s M(1), M(2), . . . , M(N) with different spectroscopic characteristics are arranged in the air in a numerical order along the arrangement axis at an interval x. FIG. 1 is a cross-sectional diagram of the dichroic mirror array by a plane covered by the arrangement axis and the emission axis. Each normal vector (not explicitly illustrated in FIG. 1) of each dichroic mirror is configured by a sum of a positive component in an arrangement axis direction and a negative component in an emission axis direction (that is, each normal vector is toward an upper left in FIG. 1), and forms an angle θ₀ (0°≤θ₀≤90°) with an opposite direction of the emission axis. That is, each normal vector is parallel to each other. Each dichroic mirror includes an optical film formed at least on a front surface of a transparent substrate with a refractive index n₀. FIG. 1 illustrates a case where N=4 and θ₀=45°. The dichroic mirror mirrors M(1) and M(N) may be replaced by total reflection mirrors. In the present embodiment, a total reflection mirror is also expressed as a dichroic mirror. As illustrated in FIG. 1, a width of each dichroic mirror is referred to as α and a thickness of each dichroic mirror is referred to as β. In addition, a depth of each dichroic mirror in a direction perpendicular to a paper surface of FIG. 1 is referred to as γ. Here, the width α is defined as a width that is parallel to a plane covered by the arrangement axis and the emission axis and is perpendicular to a normal vector. The thickness β is defined as a width of each dichroic mirror which is parallel to the normal vector. In addition, the depth γ is defined as a width which is perpendicular to the plane covered by the arrangement axis and the emission axis of each dichroic mirror and is perpendicular to the normal vector.

In addition, as illustrated in FIG. 1, a lower end of the dichroic mirror M(2) (an end of M(2) in the emission axis direction) is disposed to be shifted upward (a negative direction of the emission axis) by y with respect to a lower end of the dichroic mirror M(1) (an end of M(1) in a positive direction of the emission axis). In addition, a lower end of the dichroic mirror M(3) is disposed to be shifted upward (a negative direction of the emission axis) by z with respect to the lower end of M(2) (end of M(2) in the positive direction of the emission axis). In the same manner, with 3≤n≤N, a lower end of the dichroic mirror M(n) is disposed to be shifted upward by z with respect to a lower end of the dichroic mirror M(n−1). Thus, although it is described that the respective dichroic mirrors are arranged along the arrangement axis in the above description, strictly speaking, the arrangement direction is slightly tilted from the arrangement axis. However, since y and z are often smaller than x and the tilt is small enough, in the present embodiment, each dichroic mirror is expressed as an arrangement along the arrangement axis as described above.

Meanwhile, as illustrated in FIG. 1, an ideally parallel light beam 70 is incident on the dichroic mirror M(1) along the emission axis and is divided into a light beam to be reflected along the arrangement axis and a light beam F(1) that transmits along the emission axis. The light beam to be reflected toward the left in the drawing is incident on the dichroic mirror M(2) along the arrangement axis and is divided into a light beam F(2) to be reflected along the emission axis and a light beam that transmits along the arrangement axis. The transmitting light beam toward the left in the drawing is incident on the dichroic mirror M(3) along the arrangement axis and is divided into a light beam F(3) to be reflected along the emission axis and a light beam that transmits along the arrangement axis. In the same manner, assuming with 3≤n≤N, the light beam that transmits the dichroic mirror M(n−1) is incident on the dichroic mirror M(n) along the arrangement axis and is divided into a light beam F(n) to be reflected along the emission axis and a light beam that transmits along the arrangement axis. In FIG. 1, by using the dichroic mirror M(n) as the total reflection mirror M(n), there is no light beam transmitting M(n).

A right end of the light beam 70 (end in the negative direction of the arrangement axis) is denoted by a dashed line as a right end 66 of the light beam, a left end of the light beam (end in the positive direction of the arrangement axis) is denoted by an alternate long and short dash line as a light beam left end 67, and each is denoted by tracking to the right end and the left end of the light beam F (1), F (2), F (3), . . . , and the light beam F (N). In FIG. 1, widths of the light beams 70, F(1), F 2), . . . , F(N) are set to be equal and maximized. The width is called an opening width of the dichroic mirror array, and is referred to as W. In addition, the optical path length of the dichroic mirror array is defined as an optical path length of the longest optical path within a region surrounded by an upper end, a right end, a lower end, and a left end of the dichroic mirror array. In FIG. 1, the optical path length of the optical path from the light beam 70 to the light beam F(N), between a point having the same emission axis coordinates as the upper end of the dichroic mirror array on the optical axis of the light beam 70, that is, the upper end (end in the negative direction of the emission axis) of the dichroic mirror M(N), and a point having the same emission axis coordinates as the lower end of the dichroic mirror array on the optical axis of the light beam F(N), that is, the lower end (end in the positive direction of the emission axis) of the dichroic mirror M(1), is called an optical path length of the dichroic mirror array, and is referred to as L.

FIG. 1 illustrates an arrangement of the best mode in which W is maximized and L is minimized with respect to the given α, β, n₀, θ₀. The following two conditions are the one to have the best mode. First, the right end 66 of the light beampasses through or passes by the corners 69, which are denoted by Δ, of the left ends (ends in the arrangement axis direction) of the dichroic mirrors M(1), M(2), . . . , and M(N−1). Second, the light beam left end 67 passes through or passes by a corner 68, which is denoted by a circle, of the lower end (end in the emission axis direction) of the dichroic mirror M(1), and passes through or passes by the corners 69 of the left end (end in the arrangement axis direction) of the dichroic mirrors M(2), . . . , and M(N−1). The following relational equation is derived from a geometrical relationship of FIG. 1 based on the conditions.

First, an incidence angle at an incidence surface of the dichroic mirror M(1) of the light beam 70 is θ₀, and a refraction angle θ₁ at the incidence surface is obtained by Equation (1).

θ₁=sin⁻¹(1/n ₀×sin θ₀)  [Equation 1]

In addition, an incidence angle of the light beam onto the incidence surface of the dichroic mirrors M(2) to M(N) is 90°−θ₀, and a refraction angle θ₂ of the light beam onto each incidence surface is obtained by Equation (2).

θ₂=sin⁻¹(1/n ₀×sin(90°−θ₀))  [Equation 2]

The interval x and the width α of each of the dichroic mirrors M(1) to M(N) is obtained by Equation (3) in the best mode.

x=x ₀=cos θ₀×α+sin θ₀×β  [Equation 3]

In addition, the opening width W of the light beam is obtained by Equation (4) in the best mode.

W=W ₀ =a _(W) ×α+b _(W) xβ  [Equation 4]

Here, Equation (5) and Equation (6) are obtained.

a _(W)=cos θ₀  [Equation 5]

b _(W)≡−cos θ₀×tan θ₁  [Equation 6]

Furthermore, in the best mode, the optical path length L is obtained by Equation (7).

L=L ₀ =a _(L) ×α+b _(L)×β  [Equation 7]

Here, Equation (8) and Equation (9) are obtained.

a _(L)=(N−1)×cos θ₀+sin θ₀  [Equation 8]

b _(L)=(N−2)/cos θ₀×(2×sin(90°−θ₀−θ₂)+1-sin(θ₀+θ₂))+(N−2)×sin θ₀+2×cos θ₀  [Equation 9]

Meanwhile, the step differences y and z of each of the dichroic mirrors M(1) to M(N) are as follows in the best mode.

y=y ₀=cos θ₀×β  [Equation 10]

z=z ₀=sin(90°−θ₀−θ₂)/cos θ₂×β  [Equation 11]

As described above, x₀, W₀, L₀, y₀, and z₀ are both associated with α and β. The above α, β, n₀, θ₀, x, and z are basically equal for each dichroic mirror but are not necessarily equal. In such a case, α, β, n₀, θ₀, x, and z are average values for a plurality of dichroic mirrors.

By solving the above inversely, it is possible to derive α, β, and x for obtaining a minimum value W_(min) of a target opening width. Equation 12 (best mode at the time of equal sign) is derived from W0≥W_(min) and Equation (4).

α≥−b _(W) /a _(W)×β+1/a _(W) ×W _(min)  [Equation 12]

Equation 13 is derived from Equation (3).

x≥(sin θ₀ −b _(W) /a _(W)×cos θ₀)×β+1/a _(W)×cos θ₀ ×W _(min)  [Equation 13]

When a sign is equal, the mode becomes the best mode.

In the same manner, α, β, and x for obtaining the maximum value L_(max) of a target optical path length can be derived. Equation (14) (best mode at the time of equal sign) is derived from L₀≤L_(max) and Equation (7).

α≤−b _(L) /a _(L)×β+1/a _(L) ×L _(max)  [Equation 14]

Equation (15) is derived from Equation (3).

x≤(Sin θ₀ −b _(L) /a _(L)×cos θ₀)×β+1/a _(L)×cos θ₀ ×L _(max)  [Equation 15]

When a sign is equal, the mode becomes the best mode.

FIG. 2 illustrates a range satisfying Equation (13) and Equation (15) with the horizontal axis β and a vertical axis x in a case where N=4, n₀=1.46, θ₀=45° as an example. Parameters are set as W_(min)=0.5 mm, 1 mm, 2 mm, 3 mm, and 4 mm, and L_(max)=5 mm, 10 mm, 20 mm, 30 mm, and 40 mm, ↑ indicates a range above a straight line, and ↓ indicates a range below the straight line. It can be seen that, for example, in order to set W_(min)=0.5 mm and L_(max)=20 mm, β and x in the range above the straight line of ↑w_(min)=0.5 and below the straight line of ↓L_(max)=20 may be selected in FIG. 2.

The above description is related to a case where the light beam 70 is incident on the dichroic mirror array along the emission axis as illustrated in FIG. 1, but in a case where the light beam 70 is incident on the dichroic mirror array along the arrangement axis, only the following modification may be made in the above description as disclosed in PTL 1 and PTL 2. In 2≤n≤N, the lower end of the dichroic mirror M(n) (end of M(n) in the positive direction of the emission axis) is disposed to be shifted upward (in the negative direction of the emission axis) by z with respect to the lower end of the dichroic mirror M(n−1) (end of M(n−1) in the positive direction of the emission axis). That is, the y described above is stopped and may be replaced with z.

Hereinafter, Embodiments of the present invention will be described.

Embodiment 1

FIG. 3 illustrates an example of a dichroic mirror array that divides a light beam incident in parallel on the dichroic mirror array in a vertical direction, and illustrating calculation results of a parallel light beam having a maximum dividable width. FIG. 3 is a schematic cross-sectional diagram of the dichroic mirror array in a plane covered by the arrangement axis and the emission axis, in which light beams are incident on the dichroic mirror array along the arrangement axis direction, are divided into light beams of different wavelength bands in a plurality of emission axis directions by the dichroic mirror array, and are incident on the two-dimensional sensor 30 in parallel.

Each of the dichroic mirrors 17, 18, 19, and 20 has a width of α=5 mm and a thickness of β=1 mm, and is obtained by forming a multilayer film or a single layer film on the front surface (surface of α×β) of the lower right (the positive direction of the emission axis) of a quartz substrate (refractive index n₀=1.46) having a depth of γ=5 mm in a direction perpendicular to a paper surface of FIG. 3. However, the light transmitting the dichroic mirror 20 is not displayed. In addition, an antireflection film for reducing a reflection loss is formed on the front surface of the upper left (the positive direction of the arrangement axis) of the dichroic mirrors 17, 18, and 19. Each dichroic mirror is arranged in the air such that an angle between each normal vector and the negative direction of the emission axis is θ₀=45° and an interval in the arrangement axis direction is x=5 mm. The upper ends (the ends in the negative direction of the emission axis) and the lower ends (the ends in the positive direction of the emission axis) of the dichroic mirrors are made to be on the same plane, respectively. That is, They are arranged to have the same coordinates of on the emission axis.

FIG. 3 illustrates the calculation results of the light beams such that the width 63 of the light beams are equal and becomes maximum in the above-described dichroic mirror array. The emission axis coordinates of the optical axis of the light beam incident on the dichroic mirror array are adjusted such that the width 63 is maximized. Each light beam is configured with 11 parallel, equally-spaced light beam elements 65 with an infinitely small width, and the respective optical paths are calculated by light ray tracing according to a law of reflection and a law of refraction. That is, the width 63 of each light beam indicates the opening width W of the dichroic mirror array. In addition, the optical path length L of the dichroic mirror array is calculated as the optical path length of the optical path 64 from a point of the same arrangement axis coordinates as the right end (the end in the negative direction of the arrangement axis) of the dichroic mirror 17 in the optical path of the optical element 65 (the optical element 65 at the center of each light beam) of the optical axis of each light beam to a point of the same emission axis coordinates as the lower end (the end in the positive direction of the emission axis) of the dichroic mirror 20. As a result, the opening width 63 is calculated as W=2.1 mm and the optical path length 64 is calculated as L=19 mm.

FIG. 4 is a diagram in which a travel direction of the light beam incident on the dichroic mirror array in FIG. 3 is changed from the arrangement axis direction to the emission axis direction. Other conditions such as a dichroic mirror array are the same as in FIG. 3. The reason for doing so is that a distance between a light source (not illustrated) providing the light beam and the dichroic mirror array can be closer than in a case of FIG. 3 and an apparatus can be miniaturized. As a result, the opening width 63 is calculated as W=1.7 mm, and the optical path length 64 is calculated as L=18 mm, and as compared with FIG. 3, L is hardly changed, but W is slightly reduced.

FIG. 5 is a diagram illustrating an example in which a size of the dichroic mirror array is further reduced and the optical path length is shortened, as compared with FIG. 4. Each of the dichroic mirrors 17, 18, 19, and 20 has a width of α=2.5 mm (half of the width of FIG. 4) and a thickness of β=1 mm, and is obtained by forming a multilayer film or a single layer film on the front surface of the lower right of a quartz substrate (refractive index n₀=1.46) having a depth of γ=5 mm in the direction perpendicular to the paper surface of FIG. 3. Each dichroic mirror is arranged such that an interval in the arrangement axis direction is x=2.5 mm (half of the interval of FIG. 4). The other conditions are the same as in FIG. 4. As a result, the opening width 63 is calculated as W=0.03 mm, the optical path length 64 is calculated as L=9 mm, and as compared with FIG. 4, L is reduced by half as expected while W is greatly reduced nearly two orders of magnitude.

That is, FIG. 5 illustrates that, if the optical path length is reduced, the opening width is further reduced, and reduction of the optical path length and enlargement of the opening width cannot be both achieved. This is because, as can be seen from FIG. 5, each time the light beam passes through each dichroic mirror, an optical axis of the light beam moves in the negative direction of the emission axis due to refraction of the light beam inside each dichroic mirror and the movement distance thereof is significant as compared with the width of each dichroic mirror in the direction of the emission axis. For example, in FIG. 5, if the light beam incident on the dichroic mirror array shifts slightly in the negative direction of the arrangement axis, the optical path of a light beam element thereof is shifted in the negative direction of the emission axis from a corner of the right end of the dichroic mirror 20, and thus, it is impossible to provide the light beam reflected by the dichroic mirror 20. In the same manner, if the light beam incident on the dichroic mirror array is shifted slightly in the positive direction of the arrangement axis, the optical path of the light beam element thereof is shifted in the positive direction of the arrangement axis from a corner of the lower end of the dichroic mirror 17, and thus, it is impossible to provide the light beam passing through the dichroic mirror 17. It should be noted that, regardless of the fact that the same amount is generated in FIG. 4, the above-described movement distance is reduced more than the width of each dichroic mirror in the direction of the emission axis in FIG. 4, and thus, reduction of W does not become a problem in FIG. 4. That is, a ratio of β to α or x increases, and thereby, the reduction of W becomes a problem.

Therefore, as illustrated in FIG. 6, step shifting arrangement of each dichroic mirror in the direction of the emission axis is performed. Specifically, the lower end (the end in the positive direction of the emission axis) of the dichroic mirror 18 is shifted upward (in the negative direction of the emission axis) by y=0.7 mm as compared with the lower end (the end in the positive direction of the emission axis) of the dichroic mirror 17. Subsequently, the lower end of the dichroic mirror 19 is shifted upward by z=0.3 mm as compared with the lower end of the dichroic mirror 18. The other conditions are the same as in FIG. 5. As a result, it is found that the opening width 63 can be greatly expanded from W=0.03 mm in FIG. 5 to W=1.3 mm as illustrated in FIG. 6. Meanwhile, the optical path length 64 is slightly increased from L=11 mm as compared with FIG. 14. Thus, FIG. 6 illustrates a condition under which both reduction of the optical path length and expansion of the opening width can be achieved.

Next, a configuration of the dichroic mirror array illustrated in FIG. 6 will be discussed in detail. Since conditions of FIG. 6 are n₀=1.46, θ₀=45°, α=2.5 mm, and β=1 mm, θ₁=29° from Equation (1) and θ₂=29° from Equation (2) are calculated. In the best mode, x₀=2.5 mm from Equation (3), y₀=0.7 mm from Equation (10), and z₀=0.3 mm from Equation (11) are calculated. That is, FIG. 6 illustrates a configuration of the dichroic mirror array in the best mode. Actually, it is calculated that a_(W)=0.7 from Equation (5), b_(W)=−0.4 from Equation (6) and W₀=1.4 mm from Equation (4), and those almost coincide with W=1.3 mm obtained by light ray tracing. In addition, a_(L)=2.8 is calculated from Equation (8), b_(L)=4.2 is calculated from Equation (9), and L₀=11 mm is calculated from Equation (7), and those coincide with the above-described L=11 mm obtained by light ray tracing.

Here, the interval x between the dichroic mirrors will be discussed in detail. As described above, in the best mode, it is optimal to have x₀ of the Equation (3). In the following, it will be discussed in detail how much shift from the best mode is acceptable in view of the advantage.

A solid line illustrated in FIG. 7 denotes a result of calculating a relationship between the interval x and the opening width W obtained in the dichroic mirrors 17 and 18 in FIG. 6 by light lay tracing. In general, as the total number of dichroic mirrors increases, there is a possibility that the total opening width becomes smaller than the above result. However, the case of two dichroic mirrors is evaluated as a reference. FIG. 6 illustrates a condition of x=x₀=2.5 mm calculated by Equation (3) when θ₀=45°, α=2.5 mm, and β=1 mm, but at this time, as illustrated in FIG. 7, the opening width is maximum as W=1.3 mm. At x<x₀, W decreases in proportion to |x−x₀|, and W=0 mm at x=1.6 mm. In contrast to this, at x>x₀, W is constant as W=1.3 mm.

Meanwhile, a dashed line illustrated in FIG. 7 denotes a relationship between the interval x and a change amount ΔL of the optical path length L in FIG. 6. Here, when x=x₀=2.5 mm, ΔL and W are displayed so as to be the same height as ΔL=0 mm and W=1.3 mm. In addition, scales of a vertical axis (left side) of W and a vertical axis (right side) of ΔL are aligned, and the vertical axis of ΔL is inverted vertically. Generally, as the total number of dichroic mirrors increases, there is a possibility that ΔL is larger than the above-described results, but here, the case of two dichroic mirrors is are evaluated as indices. ΔL naturally increased in proportion to x.

From FIG. 7, an increase rate of W with respect to x at 1.6 mm≤x≤2.5 mm, and an increase rate of ΔL with respect to x at 2.5 mm≤x are both 1 in gradient, and equal to each other. In other words, it is found that performance deteriorated in proportion to |x−x₀| in both cases. In contrast to this, in the related art, β is not considered, that is, β can be regarded as 0 mm, and thus, the interval x in the case of equivalent arrangement is x=1.8 mm from Equation (3), and at this time, W=0.4 mm according to FIG. 7. From the above, it is found that 1.8 mm≤x≤3.2 mm may be set so as to obtain performance equal to or higher than the performance of the related art. Generally, in FIG. 1, it is assumed that, with 2≤n≤N, the arrangement interval x between the dichroic mirrors M(n) and M(n−1) may be set according to Equation (16).

cos θ₀ ×α≤x≤cos θ₀×α+2×sin θ₀×β  [Equation 16]

This allows the opening width W to be increased and the optical path length L to be reduced.

Subsequently, the step differences y and z between the dichroic mirrors M(1) to M(N) will be discussed in detail. As described above, in the best mode, it is optimal to have y₀ and z₀ in Equation (10) and Equation (11). In the following, it will be discussed in detail how much shift from the best mode is acceptable to obtain the advantage of the step-like arrangement. FIG. 8 (a) illustrates a calculation result of a relationship between the step difference y and the opening width W obtained by the dichroic mirrors 17 and 18 in FIG. 6. Generally, as the total number of dichroic mirrors increases, there is a possibility that the total opening width is reduced more than the above result but here, the case of two dichroic mirrors is evaluated as a reference. FIG. 6 illustrates the condition of y=y₀=0.7 mm calculated by Equation (10) when θ₀=45° and β=1 mm, but at this time, as illustrated in FIG. 8(a), the opening width is maximum as W=1.3 mm. In addition, W is reduced in proportion to |y−y₀|, and W=0.6 mm at γ=0 mm and 1.4 mm, and W=0 mm at y=−0.7 mm and 2.1 mm. Here, minus y indicates the step difference is in a direction opposite to that in FIG. 6, that is, a case where the dichroic mirror 18 is shifted in the direction of the emission axis with respect to the dichroic mirror 17. Thus, it is found that an effect of the step difference is obtained by setting 0 mm≤y≤1.4 mm.

In the same manner, FIG. 8 (b) illustrates a calculation result of a relationship between the step difference z and the opening width W obtained by the dichroic mirrors 18 and 19 in FIG. 6. FIG. 6 illustrates a condition of z=z₀=0.3 mm calculated by Equation (11) when θ₀=45° and β=1 mm, but at this time, as illustrated in FIG. 8(b), the opening width is maximum as W=1.3 mm. In addition, W is reduced in proportion to |z−z₀|, and W=1 mm at z=0 mm and 0.6 mm, and W=0 mm at z=−1.1 mm and 1.7 mm. Here, minus z indicates a step difference in a direction opposite to the direction in FIG. 6, that is, a case where the dichroic mirror 19 is shifted in the positive direction of the emission axis with respect to the dichroic mirror 18. Thus, it is found that an effect of the step difference is obtained by setting to 0 mm≤z≤0.6 mm. Generalization of the above is as follows. In FIG. 1, the end of the dichroic mirror M(2) in the emission axis direction is shifted by y in the direction opposite to the emission axis, with respect to the end of the dichroic mirror M(1) in the emission axis direction, and the opening width W can be increased and the optical path length L can be reduced by setting Equation (17) as follows.

0≤y≤2×cos θ₀×β  [Equation 17]

In addition, with 3≤n≤N, the end of the dichroic mirror M(n) in the emission axis direction is shifted by z in the direction opposite to the emission axis, with respect to the end of the dichroic mirror M(n−1) in the emission axis direction, and the opening width W can be increased and the optical path length L can be reduced by setting Equation (18) as follows.

0≤z≤2×sin(90−θ₀−θ₂)/cos θ₂×β  [Equation 18]

As described above, a case where a travel direction of a light beam incident on a dichroic mirror array is perpendicular to an arrangement direction (arrangement axis direction) of the dichroic mirror array is discussed as illustrated in FIGS. 1, 4 and 6. In contrast to this, as illustrated in FIG. 3, in a case where the travel direction of the light beam incident on the dichroic mirror array is parallel to the arrangement direction (arrangement axis direction) of the dichroic mirror array, with 2≤n≤N, an end of the dichroic mirror M(n) in the emission axis direction is shifted by z in a direction opposite to the emission axis, with respect to an end of the dichroic mirror M(n−1) in the emission axis direction to follow Equation (18). This allows the opening width W to be increased and the optical path length L to be reduced.

Embodiment 2

In Embodiment 1, increase in the opening width W and reduction in the optical path length L is accomplished by adjusting the intervals x and the step differences y and z of the plurality of dichroic mirrors. In the present embodiment, in a case where the step difference arrangement is not necessarily provided, (y=z=0), that is, even when a plurality of dichroic mirrors are arranged on the same plane, more specifically, even when ends of the dichroic mirrors in the emission axis direction are arranged on the same plane, the present embodiment proposes means for increasing the opening width W and reducing the optical path length L.

FIG. 5 of Embodiment 1 illustrates a result in a case where θ₀=45°, but a result in a case where θ₀=50° is illustrated in FIG. 9. The other conditions are the same in FIGS. 5 and 9, and the lower ends of the dichroic mirrors 17 to 20 are arranged in the same plane in both cases. Regardless of that, it became clear that the opening width 63 is only W=0.03 mm in FIG. 5, whereas the opening width is greatly increased as W=0.9 mm in FIG. 9. The optical path length 64 is not changed in both cases as L=9 mm.

The reason why such effects are obtained will be discussed next. As illustrated in FIG. 5, in the case of θ₀=45°, the light beam travels in the positive direction of the alignment axis (left direction) in a space between adjacent dichroic mirrors, whereas the light beam travels in the positive direction of the arrangement axis and the negative direction of the emission axis (upper left direction) inside each dichroic mirror, and thereby, gradually moving to the negative direction of the emission axis (upper direction) every time the light beam passes through each dichroic mirror so as to limit the opening width 63. In contrast to this, as illustrated in FIG. 9, by setting to θ₀=50°≥45°, the light beam travels in the positive direction of the arrangement axis and the positive direction of the emission axis (lower left direction) in a space between the adjacent dichro, whereas the light beam travels in the positive direction of the arrangement axis and the negative direction of the emission axis (upper left direction) inside each dichroic mirror, and thereby, both are offset, movement a light beam in the emission axis direction (vertical direction) is suppressed each time the light beam passes through the dichro, and this is led to an increase of the opening width 63.

Thus, it is favorable that θ₀ is equal to or greater than 45°, and furthermore, there should be an optimum value that maximizes the opening width 63. FIG. 10 illustrates calculation results of W when θ₀ is changed under the conditions of FIGS. 5 and 9. It is found that W increases from θ₀=45°, W become a maximum value of 0.92 mm at θ₀=52°, and W is attenuated to approximately zero at θ₀=57°. That is, it is found that W can be increased by setting to 45°≤θ₀≤57°.

Next, the above-discussion is generalized. In the same manner as discussion of FIG. 1, the following is derived from the geometrical relationship of FIG. 9. The refraction angle θ₁ of a light beam on an incidence surface of the dichroic mirror M(1) is as represented by Equation (1), an incidence angle of a light beam on an incidence surface of the dichroic mirrors M(2) to M(N) is 90−θ₀, and the refraction angle θ₂ of light beams on each incidence surface is as represented by Equation (2). A movement distance S↓ of a light beam in the positive direction (lower direction) of the emission axis, which travels in the positive direction of the arrangement axis and the positive direction of the emission axis (lower left direction) in a space between the adjacent dichroic mirrors, is obtained by Equation (19).

S↓=tan(2×θ₀−90°)×tan θ₀/(tan θ₀−tan(2×θ₀−90°))×(x−β/cos(90°−θ₀)  [Equation 19]

Meanwhile, a movement distance S↑ of a light beam in the negative direction (upper direction) of the emission axis, which travels in the positive direction of the arrangement axis and the negative direction of the emission axis (upper left direction) inside each dichroic mirror, is obtained by Equation (20).

S↑=1/cos θ₂×β×sin(90°−θ₀−θ₂)  [Equation 20]

Here, β indicates a thickness of each dichroic mirror, and x indicates an interval between the dichroic mirrors. As illustrated in FIG. 9, in order to offset S↓ and S↑, it is optimal to set S↓=S↑. Therefore, θ₀ in this best mode is referred to as θ₀(BM).

By applying Equation (19) and Equation (20) to β=1 mm and x=2.5 mm which are the conditions of FIG. 9, θ₀(BM)=50° is obtained. That is, a configuration of FIG. 9 is a configuration of the best mode. However, according to FIG. 10, W is maximized at θ₀=52°, which is greater than θ₀(BM) by 2°. This represents that W can be slightly increased if θ₀ is slightly larger than θ₀(BM), that is, S↓ is made somewhat larger than S↑ and the light beam travels progressively downward to the lower left.

From the above, with respect to a case where θ₀=45° which is a criterion in the related art, a condition for significantly increasing W is represented by Equation (21).

45°≤θ₀≤2×θ₀(BM)−45°  [Equation 21]

In addition, considering shifting of the above-described 2°, more accurate condition is represented by Equation (22).

45°≤θ₀2×θ₀(BM)−43°  [Equation 22]

Embodiment 3

A light beam as a subject of a dichroic mirror array is rarely a perfect parallel light beam but is a non-parallel light beam in many cases. That is, as the light beam travels (as the optical path length becomes larger), the diameter of the light beam is not constant but is reduced and increased. Accordingly, in the above embodiments, a configuration of a dichroic mirror array that reduces the optical path length and increases the opening width is proposed so as to be able to correspond to various light beams. In the present embodiment, the light beam as a subject is specifically defined, and it will be discussed whether or not a dichroic mirror array can deal with the light beam.

An example of a specific light beam is defined in FIG. 11. As illustrated in FIG. 11 (a), light emitted from a light emission point 1 having the diameter d is collected by a condenser lens 2 having a focal length f and an effective diameter D. The light is imaged at a position that is at an optical distance g from the condenser lens 2 to obtain a light emission point image 7. At this time, the optical distance between the light emission point 1 and the condenser lens 2 is f+f²/(g−f), and an image magnification is represented by Equation (23).

m=(g−f)/f  [Equation 23]

Accordingly, the diameter d′ of the light emission point image 7 is represented by Equation (24).

d′=m×d=(g−f)/f×d  [Equation 24]

Here, as illustrated in FIG. 11 (a), an s axis is defined along an optical axis of the condenser lens and a t axis is defined in a direction perpendicular to the s axis, with the center of the condenser lens 2 as a point of origin. However, in a case where an optical axis of the light beam, which is from the light emission point 1 and collected by the condenser lens 2, changes a direction thereof, the s axis and the t axis also change directions thereof according to the change. A location of a sensor detecting the light beam is set at any location on the s axis and is not limited to a specific location. The light emitted from the left end of the light emission point 1 is collected in accordance with the light beam of a solid line by the condenser lens 2, travels while reducing a diameter thereof, forms an image at the right end of the light emission point image 7, and travels while enlarging a diameter thereof thereafter. The light emitted from a right end of the light emission point 1 is collected in accordance with the light beam of a dashed line by the condenser lens 2, travels while reducing a diameter thereof, forms an image at the left end of the light emission point image 7, and travels while enlarging a diameter thereof thereafter. That is, the light beam obtained by collecting light emitted from the light emission point 1 using the condenser lens 2 is configured by a dashed line 88 and a solid line 90 at an intermediate between the condenser lens 2 and the light emission point image 7, and a dashed line 89 and a solid line 91 after the light emission point image 7 as envelope curves, respectively. The envelope curves are uniquely determined by d, f, D, and g, and when the diameter ϕ(s) of the light beam at a certain s coordinate satisfies 0≤s≤g (intermediate between the condenser lens 2 and the light emission point image 7), Equation (25) can be described.

ϕ(s)=((−D−d)×f+d×g)/(f×g)×s+D  [Equation 25]

When g≤s is satisfied (after the light emission point image 7), Equation (26) can be described.

ϕ(s)=((D−d)×f+d×g)/(f×g)×s−D  [Equation 26]

Meanwhile, as illustrated in FIG. 11 (b), a section in which a maximum value of the diameter of the above-described light beam becomes minimum is selected in a section of a certain section length Δs in the s axis direction, and the maximum value in this section is defined as ϕm(Δs) (Hereinafter, referred to as α maximum diameter). By using Equation (25) and Equation (26), a relationship between Δs and ϕm(Δs) for certain d, f, D, and g can be obtained.

The light beam expressed by Equation (25) and Equation (26) of FIG. 11 described above and ϕm(Δs) derived from the equations are merely examples, the same discussion can be established by obtaining a relationship between Δs and ϕm(Δs) even in other light beams, and a dichroic mirror array corresponding to such a light beam can be selected. For example, in FIG. 11, a case is considered in which a pinhole or a slit is disposed at a rear stage (a side opposite to the light emission point 1) of the condenser lens 2, a part of the light beam collected by the condenser lens 2 is incident on a sensor disposed at a rear stage (a side opposite side to the condenser lens 2) more than the pinhole or the slit, and detection is made. In such a case, it is necessary to perform setting of conditions and selection of the dichroic mirror array by using the relationship between Δs and ϕm(Δs) of the light beam of a portion incident on the sensor.

Next, a condition of a dichroic mirror array that can correspond to the light beam defined as described above will be determined. That is, a condition of a dichroic mirror array that may divide a light beam into a plurality of light beams having different wavelength bands, while avoiding shading of the incident light beam, and loss of the part of the light beam, will be determined. When N, θ₀, n₀, α, and β are given as the condition of the dichroic mirror array, the best mode is proposed in which the maximum value W₀ of the opening width W is obtained by Equation (4) and the minimum value L₀ of the optical path length L is obtained by Equation (7). Thus, the above conditions are ϕm(Δs)≤W₀ and L₀≤Δs. That is, Equation (27) and Equation (28) may be satisfied.

ϕm(Δs)≤a _(W) ×α+b _(W)×β  [Equation 27]

Δs≥a _(L) ×α+b _(L)×β  [Equation 28]

By transforming Equation (27) and Equation (28), Equation (29) and Equation (30) are obtained.

−b _(W) /a _(W)×β+1/a _(W) ×ϕm(Δs)≤α  [Equation 29]

α≤−b _(L) /a _(L)×β+1/a _(L) ×Δs  [Equation 30]

Furthermore, by transforming Equation (3), Equation (31) and Equation (32) are obtained.

(sin θ₀ −b _(W) /a _(W)×cos θ₀)×β+cos θ₀ /a _(W) ×ϕm(Δs)≤x  [Equation 31]

x≤(sin θ₀ −b _(L) /a _(L)×cos θ₀)×β+cos θ₀ /a _(L) ×Δs  [Equation 32]

By setting a to satisfy Equation (29) and Equation (30) or by setting x to satisfy Equation (31) and Equation (32) when N, θ₀, n₀, and β are given, the dichroic mirror array can satisfactorily divide the light beam of ϕm(Δs) to be targeted without loss in part.

FIG. 12 illustrates calculation results in a case where d=0.05 mm, f=1.5 mm, D=1 mm, and g=20 mm. At this time, m=12 from Equation (23) and d′=0.62 mm from Equation (24) are calculated. In FIG. 12 (a), dashed lines 88 and 89 and the solid lines 90 and 91 illustrate a relationship between s and t of the dashed lines 88 and 89 and the solid lines 90 and 91 in FIG. 11 (a), respectively, and a polygonal line 92 illustrates ϕ(s), which is obtained by Equation (25) and Equation (26), for s. The diameter ϕ(s) of the light beam is reduced from ϕ(0 mm)=1 mm at a location of the condenser lens 2 together with s, and is changed to an increase together with s, for example ϕ(50 mm)=3.0 mm after reaching the minimum of ϕ(20 mm)=0.62 mm at a location of the light emission point image 7.

FIG. 12(b) illustrates the result of obtaining ϕm(Δs) for Δs, with respect to the above results. For example, ϕm(0 mm)=0.62 mm is a result in which the above section is set to s=20 mm (a location of the light emission point image 7), ϕm(20 mm)=0.94 mm is a result in which the above section is set to 4 mm≤s≤24 mm, and ϕm(50 mm)=3.0 mm is a result in which the above section is set to 0≤s≤50 mm.

In a case where the dichroic mirror array is set to N=4, θ₀=45°, n₀=1.46, and β=1 mm with respect to the above results, a region on an upper side of a polygonal line ↑93 in FIG. 12(c) represents a relationship between Δs and x that satisfy Equation (31). In addition, a region on a lower side of a straight line ↓94 in FIG. 12 (c) satisfies a relationship between Δs and x that satisfy Equation (32). From this result, it can be seen that x compatible with Equation (31) and Equation (32) exists with respect to any Δs of Δs≥9 mm, and a dichroic mirror array capable of satisfactorily dividing the light beam exists.

For example, if Δs=10 mm, ϕm(10 mm)=0.78 mm from FIG. 12(b), and a dichroic mirror array of any x of 1.9 mm≤x≤2.2 mm obtained from FIG. 12(c) is available. Furthermore, for example, when x=2 mm, in the best mode, α=1.8 mm from Equation (3), W=0.9 mm from Equation (4) to Equation (6), L=9.4 mm from Equation (7) to Equation (9), γ=0.7 mm from Equation (10), and z=0.3 mm from Equation (11) are calculated. From the above, L≤Δs and ϕm(Δs)≤W are established, and thereby, it is found that the dichroic mirror array described above can be installed in the section of Δs and can function satisfactorily.

FIG. 13 illustrates results in a case where d=0.05 mm in FIG. 12 is changed to d=0.25 mm. The other conditions are the same as in FIG. 12. At this time, m=12 from Equation (23) and d′=3.1 mm from Equation (24) are calculated. As compared with FIG. 12(a), ϕ(s) increases rapidly with respect to s in FIG. 13 (a). ϕ(s) increases from ϕ(0 mm)=1 mm at a location of the condenser lens 2 together with s, further increases together with s even after ϕ(20 mm)=3.1 mm at the location of the light emission point image 7, and, for example, ϕ(50 mm)=9.2 mm is reached. In the same manner, ϕm(Δs) in FIG. 13(b) is also increased more than in the case of FIG. 12(b). For example, ϕm(0 mm)=1 mm is a result in which the above section is set to s=0 mm (a location of the light emission point image 7), ϕm(20 mm)=3.1 mm is a result in which the above section is set to 0 mm≤s≤20 mm, and ϕm(50 mm)=9.2 mm is a result in which the above section is set to 0≤s≤50 mm.

As a result of the above, a region (region where Equation (31) and Equation (32) are compatible) where a region on the upper side of the polygonal line ↑93 in FIG. 13(c) overlaps a region on the lower side of the polygonal line ↓94 is narrowed compared to the case of FIG. 12(c). However, it can be seen that x compatible with Equation (31) and Equation (32) exists with respect to any Δs of Δs≥17 mm, and a dichroic mirror array capable of satisfactorily dividing the light beam exists. For example, if Δs=20=is set, ϕm(20 mm)=3.08=from (b) of FIG. 13 is obtained, and a dichroic mirror array of any x of 4.2 mm≤x≤4.7=obtained from FIG. 13(c) is available.

FIG. 14 illustrates a result in a case where d=0.25 mm in FIG. 13 is changed to d=0.5 mm. The other conditions are the same as in FIG. 13. At this time, m=12 from Equation (23) and d′=6.2 mm from Equation (24) are obtained. Both ϕ(s) in FIG. 14 (a) and ϕm(Δs) in (b) of FIG. 14 are increased more than in FIGS. 13 (a) and (b) of FIG. 13, respectively. As a result, a region (region where Equation (31) and Equation (32) are compatible) where a region on the upper side of the polygonal line ↑93 in FIG. 14 (c) overlaps a region on the lower side of the polygonal line ↓94 does not exist. That is, it is found that there is no dichroic mirror array capable of satisfactorily dividing the light beam under conditions of N=4, θ₀=45°, n₀=1.46, and β=1 mm.

FIG. 15(a) illustrates a result in a case where N=4 in FIG. 12(c) is changed to N=8. It aims to increase the light beam from four-division light beam of four colors to eight-division light beam of eight colors by increasing the number of dichroic mirrors included in the dichroic mirror array from 4 to 8. The other conditions are the same as the condition in FIG. 12(c). As is apparent from Equation (7) to Equation (9), an increase of N brings an increase of L, and a range of x that satisfies Equation (32) is narrowed. Actually, the region (region where Equation (31) and Equation (32) are compatible) where a region on the upper side of the polygonal line ↑93 in FIG. 15 (a) overlaps the region on the lower side of the polygonal line ↓94 is narrowed compared with the region in FIG. 12 (c). Here, the polygonal line ↓94 is changed according to N via Equation (8) and Equation (9), whereas the polygonal line ↑93 is not changed according to N.

(b) of FIG. 15 illustrates a result in a case where N=8 in FIG. 15 (a) is changed to N=10, and the above overlapping region is further narrowed. In addition, FIG. 15(c) is a result in a case where N=8 in FIG. 15 (a) is changed to N=12, and, in the same manner as in the case of FIG. 14(c), the above overlapping area does not exist.

FIG. 16 illustrates results in a case where g=20 mm in FIG. 15(c) is changed to g=50 mm as an example of countermeasure against the result in FIG. 15(c). The other conditions are the same as the condition in FIG. 15(c). At this time, m=32 from Equation (23) and d′=1.6 mm from Equation (24) are obtained. As illustrated in FIG. 16(a), ϕ(s) is increased from ϕ(0 mm)=1 mm at the location of the condenser lens 2 together with s, and ϕ(50 mm)=1.6 mm at the location of the light emission point image 7 is reached. In addition, as illustrated in (b) of FIG. 13, ϕm(Δs) is increased from ϕm(0 mm)=1 mm together with Δs, and ϕm(50 mm)=1.6 mm is reached.

As a result, unlike the case of FIG. 15(c), the region (region where Equation (31) and Equation (32) are compatible) where the region on the upper side of the polygonal line ↑93 in FIG. 16(c) overlaps the region on the lower side of the polygonal line ↓94 exist. For example, if Δs=50 mm is set, ϕm(50 mm)=1.6 mm from (b) of FIG. 16 is obtained, and a dichroic mirror array of any x of 2.7 mm≤x≤3.6 mm obtained from FIG. 16(c) is available.

Embodiment 4

In the above embodiments, a case where a single dichroic mirror array divides a single light beam into a plurality of light beams having different wavelength bands is mainly described, but the present invention is not limited thereto. In the present embodiment, an example will be described in which a single dichroic mirror array divides a plurality of light beams into a plurality of light beams having different wavelength bands in parallel.

FIG. 17 illustrates an apparatus that performs multicolor detection of each light emitted from a plurality of light emission points 1 using a condenser lens array and a dichroic mirror array. FIG. 17(a) is a schematic diagram of a multicolor detection apparatus viewed from a direction perpendicular to a plane including each optical axis of a plurality of condenser lenses 2, (b) of FIG. 17 is a schematic sectional diagram, which includes a light axis of one condenser lens 2, of the multicolor detection apparatus perpendicular to an arrangement direction of the condenser lens array, and FIG. 17(c) is an explanatory diagram illustrating an image 29 which is detected by a two-dimensional sensor 30. Here, an example in which four-color detection is performed will be described.

First, as illustrated in FIG. 17 (a), for example, each light emitted from a light emission point array in which four light emission points 1 are arranged is collected in parallel by each condenser lens 2 of a condenser lens array 8 in which the four condenser lenses 2 are arranged to form light beams 9. Next, each light beam 9 is made to pass through a single long-pass filter 10 in parallel and made to be incident on a single dichroic mirror array in parallel. The long pass filter 10 is for blocking irradiation light causing the light emission point 1 to emit light and can be omitted when it is not necessary. For example, the dichroic mirror array is the same as the dichroic mirror array illustrated in FIG. 4. However, a width of a light emission point array of each dichroic mirror in the arrangement direction is sufficiently lengthened such that each dichroic mirror configuring the dichroic mirror array functions in parallel to the plurality of light beams. Of course, the dichroic mirror array may be replaced with any other dichroic mirror array proposed in the present invention.

As illustrated in (b) of FIG. 17, the dichroic mirrors 17, 18, 19, and 20 are arranged in a direction perpendicular to both the optical axis and the arrangement direction of the condenser lens 2. Here, the dichroic mirror 20 may be a total reflection mirror. Initially, each light beam 9 incident on the dichroic mirror array is divided in parallel into a light beam 21 which passes through the dichroic mirror 17 and a light beam which is reflected by the dichroic mirror 17, the respective light beams reflected toward the left in the drawing are divided in parallel into a light beam that passes through the dichroic mirror 18 and a light beam 22 which is reflected by the dichroic mirror 18, the light beam that passes through toward the left in the drawing is divided into a light beam that passes through the dichroic mirror 19 and a light beam 23 which is reflected by the dichroic mirror 19, and the light beam that passes through toward the left in the drawing is divided into a light beam (not illustrated) that passes through the dichroic mirror 20 and a light beam 24 which is reflected by the dichroic mirror 20. Finally, the light beams 21, 22, 23, and 24 originating from the respective light emission points 1 are caused to travel in the same direction as the optical axes of the respective condenser lens 2, and these are caused to be incident on the two-dimensional sensor 30 in parallel, and light emission point images 25, 26, 27, and 28 originating from the respective light emission points 1 are formed. Here, the respective light emission point images are not necessarily images formed by focusing the light emission points, and may not be defocused images. As illustrated in FIG. 17(a), four light beams 9 are incident in parallel at different locations of the single long-pass filter 10 and at different locations of the single dichroic mirror 17. The dichroic mirrors 18, 19, and 20 and the two-dimensional sensor also have the same parallel processing of light beam as described above. As illustrated in FIG. 17 (c), a total of 16 light emission point images 25 to 28 obtained by dividing the light emitted from the four light emission points 1 into four are obtained on the image 29 of the two-dimensional sensor 30. Since the 16 light emission point images can be separately detected, it is possible to simultaneously detect four colors of the light emitted from the four light emission points 1.

By controlling transmission characteristics and reflection characteristics of the long-pass filter 10 and the dichroic mirrors 17 to 20, for example, the light beam 21 has mainly a component of A fluorescence, the light beam 22 has mainly a component of B fluorescence, the light beam 23 has mainly a component of C fluorescence, and the light beam 24 has mainly a component of D fluorescence, and the fluorescence of A, B, C, and D can be detected by detecting intensities of the light emission point images 25, 26, 27, and 28. The wavelength bands of the light beams 25, 26, 27, and 28 may be designed at any manner, but when these are arranged in order of wavelength, it is easier to design the dichro. That is, it is favorable to be either a central wavelength of A fluorescence >a central wavelength of B fluorescence >a central wavelength of C fluorescence >a central wavelength of D fluorescence, or the central wavelength of A fluorescence <the central wavelength of B fluorescence <the central wavelength of C fluorescence <the central wavelength of D fluorescence.

In addition, although not illustrated in FIG. 17, bandpass filters or color glass filters having different spectroscopic characteristics are arranged at locations of the light beams 21, 22, 23, and 24, and it is effective that the spectroscopic characteristics of the dichroic mirrors 17 to 20 are compensated or increased. Furthermore, although not illustrated in FIG. 17, it is effective to provide irradiation light such as excitation light for causing light to be emitted from the light emission point 1. If the irradiation light is irradiated in a direction perpendicular to an optical axis of the condenser lens 2 without using the condenser lens 2, a ratio of irradiation light incident on a sensor via the condenser lens 2 can be reduced, which is advantageous in terms of sensitivity. In addition, it is also effective to adopt a so-called epi-illumination light emission detection configuration in which, instead of the long-pass filter 10, another dichroic mirror is disposed, the irradiation light is reflected by the dichroic mirror and then is focused by the condenser lens 2 to be applied to the light emission point 1, the light emitted from the light emission point 1 is collected by the same condenser lens 2 and then passes through the dichro, and the light is detected by a multicolor detection apparatus which is the same as the apparatus illustrated in FIG. 17.

Next, conditions in which the multicolor detection apparatus illustrated in FIG. 17 detects light emitted from a plurality of light emission points 1 with high sensitivity and low crosstalk will be discussed. FIG. 18 is a sectional diagram including an optical axis of an optical system that collects light emitted from the two adjacent light emission points 1 using separate condenser lenses 2 and obtains a light emission point image 7 which is an image of the light emission point 1 at a sensor location. In the present embodiment, the expression “light emission point image” does not necessarily mean an image obtained by collecting emitted light from the light emission point and focusing the image thereof, but generally means a cross section at a predetermined location of the light beam formed by collecting the light emitted from the light emission point. The diameter of the light emission point 1 is referred to as d, a focal length of the condenser lens 2 is referred to as f, an effective diameter of the condenser lens 2 is referred to as D, an interval between the light emission points 1 and an interval between condenser lenses 2 are referred to as p, the diameter of a detection region of the sensor is referred to as D, an optical distance between the condenser lens 2 and the sensor is referred to as g, and the diameter of the light emission point image 7 at the sensor location is referred to as d′. When a distance between the light emission point 1 and the condenser lens 2 is adjusted and an image is formed using the light emitted from the light emission point 1 at the sensor location by the condenser lens 2, the diameter of the light emission point image 7 becomes the smallest d′. At this time, the image magnification m is as illustrated in Equation (23), and the diameter d′ of the light emission point image 7 is as illustrated in Equation (24). However, the light emission point image 7 may not necessarily be formed at the sensor location, and in this case, the present embodiment is not limited to the above description.

The light emission point 1 viewed from an optical axis direction is illustrated on a lower side of an optical system of FIG. 18, and the light emission point image 7 viewed from the optical axis direction is illustrated on an upper side thereof. In each drawing of the present specification, the light emission point 1 and the light emission point image 7 are drawn in a circular shape, respectively, but those are not limited to the circular shape in reality, and other shapes may be used. Generally, the diameter d of the light emission point 1 and the diameter d′ of the light emission point image 7 are referred to as widths of the light emission point 1 and the light emission point image 7 in the arrangement direction, respectively. In addition, as will be described below, there is a case where there are a plurality of optical distances between the condenser lenses 2 and the sensors among the same light emission detection apparatus. In this case, when a maximum value of the optical distance between the condenser lens 2 and the sensor is referred to as an optical path length g, Equation (33) to Equation (49) may be established as follows.

First, a condition for obtaining high sensitivity will be discussed. A light collection efficiency of the light emitted from the light emission point 1 which is collected by the condenser lens 2 can be expressed by an F value of the condenser lens 2, which is F=f/D (the light collection efficiency is proportional to 1/F²). In order to satisfy F≤2.8, f≤2.8×D may be satisfied. Meanwhile, in order to configure the condenser lens array, Equation (33) is required.

p≥D  [Equation 33]

Thus, Equation (34) is a condition of F 2.8.

f≤2.8×p  [Equation 34]

In the same manner, in order to satisfy F≤2.0, 1.4, 1.0, and 0.7, Equations (35), (36), (37) and (38) are conditions.

f≤2.0≤p  [Equation 35]

f≤1.4×p  [Equation 36]

f≤1.0×p  [Equation 37]

f≤0.7×p  [Equation 38]

Equation (34) to Equation (38) described above are correct when the distance between the light emission point 1 and the condenser lens 2 can be approximated by f, but more strictly, the equations can be expressed as follows. When the light emitted from the light emission point 1 is imaged at the optical distance g by the condenser lens 2, the distance between the light emission point 1 and the condenser lens 2 is f²/(g−f)+f, and thereby, the effective F value of the condenser lens 2 can be expressed as F′=(f²/(g−f)+f)/D. Thus, in order to satisfy F′≤2.8, 2.0, 1.4, 1.0, and 0.7, each of following Equations (39), (40), (41), (42) and (43) is a strict condition.

f≤(1/(2.8×p)+1/g)⁻¹  [Equation 39]

f≤(1/(2.0×p)+1/g)⁻¹  [Equation 40]

f≤(1/(1.4×p)+1/g)⁻¹  [Equation 41]

f≤(1/(1.0×p)+1/g)⁻¹  [Equation 42]

f≤(1/(0.7×p)+1/g)⁻¹  [Equation 43]

Next, a condition for obtaining low crosstalk will be discussed. As illustrated in FIG. 18, in a case where the light emission point images 7 of the adjacent light emission points 1 do not overlap each other, crosstalk does not occur, but as illustrated in FIG. 19, if the light emission point images overlap each other, crosstalk occurs. Hereinafter, the crosstalk is expressed by a ratio X of an overlapping area of the adjacent light emission point images 7 with respect to an area of the light emission point image 7 in FIG. 19. In order to set the crosstalk to X or less, Equation (44) is set, and Equation (45) is a condition.

X=1/π×(cos⁻¹(V ²/2−1)−sin(cos⁻¹(V ²/2−1))  [Equation 44]

V≤2×p/d′  [Equation 45]

If Equation (45) is transformed by using Equation (24), Equation (46) can be obtained.

f≥1/((2×p)/(V×d)+1)×g  [Equation 46]

In order to perform detection of the light which becomes a detection target and is emitted from the light emission point 1 without being influenced by the lights emitted from the adjacent light emission points 1, it is necessary for the distance between the two light emission point images 7 to be at least larger than a radius (or half of the diameter) of the light emission point in FIG. 19. If this is expressed by using Equation (44) and Equation (45), X=0.39 (390), V=1, and Equation (46) can be expressed by Equation (47).

f≥1/(2×p/d+1)×g  [Equation 47]

In order to more effectively and independently detect the light emitted from the plurality of light emission points 1, it is desirable to set the total ratio of crosstalk from both sides to 50% or less, and for that purpose, if X and V are expressed by using Equation (44) and Equation (45), X=0.25 (25%), V=1.27, and Equation (46) requires Equation (48) as a condition.

f≥1/((2×p)/(1.27×d)+1)×g  [Equation 48]

More desirably, it is better to set the crosstalk to 0%, and for that purpose, if X and V are expressed by using Equation (44) and Equation (45), X=0 (0%) and V=2, Equation (46) requires Equation (49) as a condition.

f≥1/(p/d+1)×g  [Equation 49]

As described above, it is possible to obtain desirable light collection efficiency and sensitivity by selecting g and f that satisfy any one of Equation (34) to Equation (43) with respect to the given p and d. Meanwhile, it is possible to obtain desirable crosstalk by selecting g and f that satisfy any one of Equation (47) to Equation (49) with respect to the given p and d. That is, it is possible to obtain both sensitivity and crosstalk which are trade-off relationship at a desirable level by selecting g and f that satisfy both one of Equation (34) to Equation (43) and one of Equation (47) to Equation (49).

In the present specification, the diameter of the condenser lens 2 is basically a circle having the effective diameter D, but is not required absolutely. Generally, the effective diameter D of the condenser lens 2 indicates an arrangement direction of the light emission points 1 and the width of the condenser lens 1 in the arrangement direction, and a width in a direction orthogonal to the arrangement direction is not limited thereto. The condenser lens 2 may have a circular shape, an elliptical shape, a square shape, a rectangular shape, or any other shape. Since the diameter d′ of the light emission point image 7 is irrelevant to D, the conditions of Equation (44) to Equation (49) described above relating to the crosstalk are established as it is regardless of the width in the direction orthogonal to the arrangement direction of the condenser lens 2. Meanwhile, if the width in the direction orthogonal to the arrangement direction of the condenser lens 2 is larger than the effective diameter D, the F value can be reduced more than F=f/D, that is, the light collection efficiency can be further increased. In this case, the conditions of Equation (34) to Equation (43) described above relating to sensitivity can cause even higher relative detection light amount and sensitivity to be achieved.

FIG. 20 is a diagram in which conditions satisfying Equation (34) to Equation (43) and Equation (47) to Equation (49) in a case where p=1 mm and d=0.05 mm are denoted by a horizontal axis g and a vertical axis f, as a typical example. Numbers indicating a curved line or a straight line indicate boundary lines of equations of corresponding numbers, ↓ indicates a region on a lower side from the boundary line, and ↑ indicates a region on a higher side from the boundary line. For example, in order to satisfy Equation (34) which is a condition of F≤2.8, g and f in the region on a lower side than the straight line ↓(34) in FIG. 20 may be used. Meanwhile, in order to satisfy Equation (48) which is a condition of crosstalk of 25% or less, g and f in the region on a higher side than the straight line ↑(48) in FIG. 20 may be used. That is, in order to set F≤2.8 and crosstalk to 25% or less, g and f in a region on a lower side than the straight line ↓(34) and in a region on a higher side than the straight line ↑(48) in FIG. 20 may be used. As is apparent from the magnitudes of g and f, a light emission detection apparatus that uses g and f illustrated in FIG. 20 has characteristics in which not only high sensitivity and low crosstalk performance can be achieved but also a size of the apparatus can be significantly reduced as apparent from the size of g and f.

In the multicolor detection apparatus illustrated in FIG. 17, the diameter d of each light emission point 1, the distance p between each light emission point 1 and each condenser lens 2, the focal length f of each condenser lens 2, the effective diameter D, and the optical distance g between each condenser lens 2 and the sensor 30 satisfy the above relational equations, and thereby, a predetermined high sensitivity and low crosstalk are realized, and miniaturization and cost reduction of the detection apparatus are realized. Here, characteristics that reduce the size and cost of the multicolor detection apparatus of the light emission point array in which the dichroic mirror array illustrated in FIG. 17 is used are summarized in following (1) to (10). All the characteristics are not necessarily satisfied, and it is effective to satisfy even one of those.

(1) With respect to M light emission points of a light emission point array, M light beams obtained by collecting light emitted from each light emission point using a condenser lens array are divided into N light beams having different wavelength components and travel in the same direction respectively.

(2) With respect to the M light emission points of the light emission point array, the M light beams obtained by collecting the light emitted from each light emission point using the condenser lens array are divided into N light beams having different wavelength components and travel in an optical axis direction of each condenser lens respectively.

(3) With respect to the M light emission points of the light emission point array, a direction in which the M light beams obtained by collecting the light emitted from each light emission point using the condenser lens array are divided into different wavelength components is defined as a direction perpendicular to the arrangement direction of the light emission point array and the condenser lens array.

(4) With respect to the M light emission points of the light emission point array, the direction in which the M light beams obtained by collecting the light emitted from each light emission point using the condenser lens array are divided into different wavelength components is defined as a direction perpendicular to an optical axis of each condenser lens.

(5) With respect to the M light emission points of the light emission point array, N dichroic mirrors that divide the M light beams obtained by collecting the light emitted from each light emission point using the condenser lens array into different wavelength components are arranged in the direction perpendicular to the arrangement direction of the light emission point array and the condenser lens array.

(6) With respect to the M light emission points of the light emission point array, N dichroic mirrors that divide the M light beams obtained by collecting the light emitted from each light emission point using the condenser lens array into different wavelength components are arranged in the direction perpendicular to the optical axis of each condenser lens.

(7) With respect to the M light emission points of the light emission point array, M×N light beams obtained by dividing the M light beams obtained by collecting the light emitted from each light emission point using the condenser lens array into N different wavelength components are directly incident on a sensor without being collected again.

(8) With respect to the M light emission points of the light emission point array, an optical axis of each condenser lens of the condenser lens array that collects the light emitted from each light emission point is perpendicular to a sensor surface.

(9) N dichroic mirrors are configured with different types, each dichroic mirror is formed of a single member, and M light beams obtained by separately collecting the light emitted from the M light emission points of the light emission point array are incident on each dichroic mirror in parallel.

(10) M×N light beams obtained by dividing the M light beams obtained by separately collecting the light emitted from the M light emission points of the light emission point array into N different wavelength components, respectively, are incident in parallel on a single sensor.

Meanwhile, each light beam having the above-described characteristics needs to be satisfactorily divided without loss due to the dichroic mirror array. This is the same discussion as in Embodiment 3, and it is necessary to satisfy ϕm(Δs)≥MAX(D,d′) in Equation (27), and Δs≤g in Equation (28). Here, MAX(D,d′) is a function indicating either D or d′ whichever is larger. Based on the above, the condition is as follows.

D≤a _(W) ×α+b _(W)×β  [Equation 50]

d′≤a _(W) ×α+b _(W)×β  [Equation 51]

g≥a _(L) ×α+b _(L)×β  [Equation 52]

If these are transformed in the same way as Equation (31) and Equation (32), Equation (53), Equation (54), and Equation (55) are obtained.

(sin θ₀ −b _(W) /a _(W)×cos θ₀)×β+cos θ₀ /a _(W) ×D≤x  [Equation 53]

(sin θ₀ −b _(W) /a _(W)×cos θ₀)×β+cos θ₀ /a _(W) ×d′≤x  [Equation 54]

x≤(sin θ₀ −b _(L) /a _(L)×cos θ₀)×β+cos θ₀ /a _(L) ×g  [Equation 55]

The present invention is not limited to the above-described embodiments and includes various modification examples. For example, the above-described embodiments are described in detail so as to explain the present invention in an easy-to-understand manner, and are not necessarily limited to those having all the configurations described. In addition, a part of the configuration of a certain embodiment can be replaced by the configuration of another embodiment, and a configuration of another embodiment can be added to a configuration of a certain embodiment. In addition, it is possible to add, remove, and replace other configurations with respect to a part of the configuration of each embodiment.

REFERENCE SIGNS LIST

1: light emission point, 2: condenser lens, 6: light beam, 7: light emission point image, 8: condenser lens array, 9: light beam, 10: long pass filter, 17-20: dichro, 30: two-dimensional sensor, 63: opening width, 64: optical path length, 70: light beam 

1. A dichroic mirror array in which a plurality of dichroic mirrors of numbers 1, 2, . . . , N are arranged in a numerical order in a first direction with N≥2, wherein a normal vector on a front surface of the plurality of dichroic mirrors is configured by a sum of a positive component in the first direction and a negative component in a second direction perpendicular to the first direction, wherein the plurality of normal vectors are substantially parallel to each other, and wherein, with 0≤θ₀≤90°, when an average of angles which are formed by the plurality of normal vectors and a direction opposite to the second direction is referred to as θ₀, an average of refractive indices of substrates of the dichroic mirrors is referred to as n₀, an average of widths of the substrates of the dichroic mirrors is referred to as α, an average of thicknesses of the substrates of the dichroic mirrors is referred to as β, and an average of intervals between the dichroic mirrors is referred to as x, and with 2≤n≤N, when an average of distances by which an end of the nth dichroic mirror in the second direction is shifted in the direction opposite to the second direction with respect to an end of the (n−1)th dichroic mirror in the second direction is referred to as yz, θ₀, n₀, α, β, x, and yz satisfy a predetermined relationship so as to increase an opening width of the dichroic mirror array or reduce an optical path length thereof.
 2. The dichroic mirror array according to claim 1, wherein, when θ₂=sin⁻¹(1/n₀×sin(90°−θ₀)), 0≤yz≤2×sin(90°−θ₀−θ₂)/cos θ₂×β is satisfied.
 3. The dichroic mirror array according to claim 1, wherein, with θ₂=sin⁻¹(1/n₀×sin(90°−θ₀)), when n=2, 0≤yz≤2×cos θ₀×β is satisfied, and when 3≤n≤N, 0≤yz≤2×sin(90°−θ₀−θ₂)/cos θ₂×β is satisfied.
 4. The dichroic mirror array according to claim 1, wherein cos θ₀×α≤x≤cos θ₀×α+2×sin θ₀×β is satisfied.
 5. The dichroic mirror array according to claim 1, wherein, with θ₂=sin⁻¹(1/n₀×sin(90°−θ₀)), S↓=tan(2×θ₀−90°)×tan θ₀/(tan θ₀−tan(2×θ₀−90°))×(x−β/cos(90°−θ₀), and S↑=1/cos θ₂×β×sin(90°−θ₀−θ₂), when θ₀ that satisfies S↑=S↓ is referred to as θ₀(BM), 45°≤θ₀≤2×θ₀(BM)−43° is satisfied.
 6. A light detection apparatus comprising: a dichroic mirror array; and a sensor, wherein a maximum diameter, which is in an optical path section of an optical path length Δs, of an effective light beam of a light beam which is incident on the sensor to be detected is given as ϕm(Δs) as a function of Δs, wherein the dichroic mirror array is configured by arranging a plurality of dichroic mirrors of numbers 1, 2, . . . , N in a numerical order in a first direction with N≥2, wherein a normal vector on a front surface of the plurality of dichroic mirrors is configured by a sum of a positive component in the first direction and a negative component in a second direction perpendicular to the first direction, wherein the plurality of normal vectors are substantially parallel to each other, wherein, with 0≤θ₀≤90°, when an average of angles which are formed by the plurality of normal vectors and a direction opposite to the second direction is referred to as θ₀, an average of refractive indices of substrates of the dichroic mirrors is referred to as n₀, an average of widths of the substrates of the dichroic mirrors is referred to as α, an average of thicknesses of the substrates of the dichroic mirrors is referred to as β, and an average of intervals between the dichroic mirrors is referred to as x, and with 2≤n≤N, when an average of distances by which an end of the nth dichroic mirror in the second direction is shifted in the direction opposite to the second direction with respect to an end of the (n−1)th dichroic mirror in the second direction is referred to as yz, Δs, ϕm(Δs), N, θ₀, n₀, α, β, x, and yz satisfy a predetermined relationship such that the at least one light beam is capable of being detected by the sensor using the dichroic mirror array.
 7. The light detection apparatus according to claim 6, wherein, when θ₁=sin⁻¹(1/n₀×sin θ₀), θ₂=sin⁻¹(1/n₀×sin(90°−θ₀), a_(W)=cos θ₀, b_(W)=−cos θ₀×tan θ_(L), a_(L)=(N−1)×cos θ₀+sin θ₀, and b_(L)=(N−2)/cos θ₀×(2×sin(90°−θ₀−θ₂)+1−sin(θ₀+θ₂))+(N−2)×sin θ₀+2×cos θ₀, (sin θ₀−b_(W)/a_(W)×cos θ₀)×β+cos θ₀/a_(W)×ϕm(Δs)×(sin θ₀−b_(L)/a_(L)×cos θ₀)×β+cos θ₀/a_(L)×Δs is satisfied.
 8. The light detection apparatus according to claim 6, wherein, when θ₂=sin⁻¹(1/n₀×sin(90°−θ₀)), 0≤yz≤2×sin(90°−θ₀−θ₂)/cos θ₂×β is satisfied.
 9. The light detection apparatus according to claim 6, wherein, with θ₂=sin⁻¹(1/n₀×sin(90°−θ₀)), when n=2, 0≤yz≤2×cos θ₀×β is satisfied, and when 3≤n≤N, 0≤yz≤2×sin(90°−θ₀−θ₂)/cos θ₂×β is satisfied.
 10. The light detection apparatus according to claim 6, wherein cos θ₀×α≤x≤cos θ₀×α+2×sin θ₀×β is satisfied.
 11. The light detection apparatus according to claim 6, wherein the light beam is incident on the dichroic mirror array along the second direction, wherein divided light beams that are obtained by dividing the light beam into N different light beams in the first direction are emitted from the dichroic mirror array along in the second direction, and wherein the N divided light beams are incident on the sensor in parallel and are collectively detected.
 12. The light detection apparatus according to claim 11, wherein the light beam has M light beams that are arranged in a third direction perpendicular to both the first direction and the second direction, wherein the M light beams are incident on the dichroic mirror array in parallel along the second direction, wherein divided light beams that are obtained by dividing the M light beams into N light beams different from each other in the first direction are emitted from the dichroic mirror array along the second direction, and wherein the M×N divided light beams are incident on the sensor in parallel and are collectively detected.
 13. A light detection apparatus comprising: a condenser lens array in which M condenser lenses are arranged which separately collect light that is emitted from light emission points of a light emission point array in which M light emission points are arranged and which forms M light beams, with M≥1; a dichroic mirror array in which N dichroic mirrors are arranged with N≥2; and a sensor, wherein the dichroic mirror array is configured by arranging a plurality of dichroic mirrors of numbers 1, 2, . . . , N in numerical order in a first direction, wherein a normal vector on a front surface of the N dichroic mirrors is configured by a sum of a positive component in the first direction and a negative component in a second direction perpendicular to the first direction, wherein the N normal vectors are substantially parallel to each other, wherein each of arrangement directions of the light emission point array and the condenser lens array is a third direction perpendicular to both the first direction and the second direction, wherein, an average of effective diameters of the M light emission points is referred to as d, an average of focal lengths of the M condenser lenses is referred to as f, an average of effective diameters of the M condenser lenses is referred to as D, an average of intervals between the M condenser lenses is referred to as p in a case where M≥2, an average of maximum optical path lengths of the M condenser lenses and the sensor is referred to as g, with 0≤θ₀≤90°, when an average of angles which are formed by the N normal vectors and a direction opposite to the second direction is referred to as θ₀, an average of refractive indices of substrates of the N dichroic mirrors is referred to as n₀, an average of widths of the substrates of the N dichroic mirrors is referred to as α, an average of thicknesses of the substrates of the N dichroic mirrors is referred to as β, and an average of intervals between the N dichroic mirrors is referred to as x, and with 2≤n≤N, when an average of distances by which an end of the nth dichroic mirror in the second direction is shifted in the direction opposite to the second direction with respect to an end of the (n−1)th dichroic mirror in the second direction is referred to as yz, d, f, D, p, g, θ₀, N, n₀, α, β, x, and yz satisfy a predetermined relationship such that M pieces of emitted light are capable of being detected by the sensor using the dichroic mirror array.
 14. The light detection apparatus according to claim 13, wherein the M light beams are incident on the dichroic mirror array in parallel in the second direction, wherein divided light beams which are obtained by dividing the M light beams into N light beams different from each other in the first direction are emitted from the dichroic mirror array in the second direction, and wherein the M×N divided light beams are incident on the sensor in parallel and are collectively detected.
 15. The light detection apparatus according to claim 13, wherein, when θ₁=sin⁻¹(1/n₀×sin θ₀), θ₂=sin⁻¹(1/n₀×sin(90°−θ₀), a_(W)=cos θ₀, b_(W)=−cos θ₀×tan θ_(L), a_(L)=(N−1)×cos θ₀+sin θ₀, b_(L)=(N−2)/cos θ₀×(2×sin(90°−θ₀−θ₂)+1−sin(θ₀+θ₂))+(N−2)×sin θ₀+2×cos θ₀, and d′=(g−f)/f×d, (sin θ₀−b_(W)/a_(W)×cos θ₀)×β+cos θ₀/a_(W)×D≤x is satisfied, and (sin θ₀−b_(W)/a_(W)×cos θ₀)×β+cos θ₀/a_(W)×d′≤x≤(sin θ₀−b_(L)/a_(L)×cos θ₀)×β+cos θ₀/a_(L)×g is satisfied.
 16. The light detection apparatus according to claim 13, wherein, when θ₂=sin⁻¹(1/n₀×sin(90°−θ₀)), 0≤yz≤2×sin(90°−θ₀−θ₂)/cos θ₂×β is satisfied.
 17. The light detection apparatus according to claim 13, wherein, with θ₂=sin⁻¹(1/n₀×sin(90°−θ₀)), when n=2, 0≤yz≤2×cos θ₀×β is satisfied, and when 3≤n≤N, 0≤yz≤2×sin(90°−θ₀−θ₂)/cos θ₂×β is satisfied.
 18. The light detection apparatus according to claim 13, wherein cos θ₀×α≤x≤cos θ₀×α+2×sin θ₀×β is satisfied.
 19. The light detection apparatus according to claim 13, wherein, when M≥2, f≥1/((2×p)/(1.27×d)+1)×g is satisfied.
 20. The light detection apparatus according to claim 13, wherein, when M≥2, f≥1/(p/d+1)×g is satisfied. 